Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472379 | Method of multiple zone symmetric gas injection for inductively coupled plasma | Steven Lane, Kartik Ramaswamy, Lawrence Wong | 2016-10-18 |
| 9449794 | Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna | Andrew Nguyen, Kartik Ramaswamy, Jason A. Kenney, Shahid Rauf, Kenneth S. Collins +2 more | 2016-09-20 |
| 9412563 | Spatially discrete multi-loop RF-driven plasma source having plural independent zones | Kartik Ramaswamy, Kenneth S. Collins, Shahid Rauf, Steven Lane, Lawrence Wong | 2016-08-09 |