Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472379 | Method of multiple zone symmetric gas injection for inductively coupled plasma | Steven Lane, Yang Yang, Kartik Ramaswamy | 2016-10-18 |
| 9412563 | Spatially discrete multi-loop RF-driven plasma source having plural independent zones | Kartik Ramaswamy, Kenneth S. Collins, Shahid Rauf, Steven Lane, Yang Yang | 2016-08-09 |
| 9240552 | Carbon nanotube semiconductor devices and deterministic nanofabrication methods | Scott B. Clendenning, David J. Michalak | 2016-01-19 |