Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9338871 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Chunlei Zhang, Yashaswini B. Pattar, Duy D. Nguyen +7 more | 2016-05-10 |
| 9269587 | Methods for etching materials using synchronized RF pulses | Daisuke Shimizu, Jong Mun Kim, Katsumasa Kawasaki | 2016-02-23 |