Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269587 | Methods for etching materials using synchronized RF pulses | Daisuke Shimizu, Jong Mun Kim, Sergio Fukuda Shoji | 2016-02-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269587 | Methods for etching materials using synchronized RF pulses | Daisuke Shimizu, Jong Mun Kim, Sergio Fukuda Shoji | 2016-02-23 |