Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443700 | Electron beam plasma source with segmented suppression electrode for uniform plasma generation | Shahid Rauf, Kenneth S. Collins, Nipun Misra, Kartik Ramaswamy, James D. Carducci +1 more | 2016-09-13 |
| 9378941 | Interface treatment of semiconductor surfaces with high density low energy plasma | Aneesh Nainani, Bhushan Zope, Shahid Rauf, Adam Brand, Mathew Abraham +1 more | 2016-06-28 |
| 9269546 | Plasma reactor with electron beam plasma source having a uniform magnetic field | Ming-Feng Wu, Ajit Balakrishna, Shahid Rauf, Kenneth S. Collins, Nipun Misra | 2016-02-23 |