Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9429247 | Acoustically-monitored semiconductor substrate processing systems and methods | Kommisetti Subrahmanyam, Todd Egan, Michael W. Johnson | 2016-08-30 |
| 9378994 | Multi-position batch load lock apparatus and systems and methods including same | William T. Weaver, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2016-06-28 |
| 9355819 | Elongated capacitively coupled plasma source for high temperature low pressure environments | John C. Forster, Garry K. Kwong, Tai T. Ngo, Kevin Griffin, Kenneth S. Collins +1 more | 2016-05-31 |
| 9305805 | Methods for atomic layer etching | Mei Chang | 2016-04-05 |
| 9261193 | Sealing apparatus for a process chamber | — | 2016-02-16 |