Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496117 | Two-dimensional mass resolving slit mechanism for semiconductor processing systems | Robert Brent Vopat | 2016-11-15 |
| 9378994 | Multi-position batch load lock apparatus and systems and methods including same | William T. Weaver, Joseph Yudovsky, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2016-06-28 |
| 9287148 | Dynamic heating method and system for wafer processing | Morgan Evans, Kevin Anglin, D. Jeffrey Lischer, William T. Weaver, Robert Brent Vopat | 2016-03-15 |
| 9281222 | Wafer handling systems and methods | William T. Weaver, Malcolm N. Daniel, JR., Robert Brent Vopat, Jacob Newman, Dinesh Kanawade +4 more | 2016-03-08 |