Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378994 | Multi-position batch load lock apparatus and systems and methods including same | William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat +1 more | 2016-06-28 |
| 9281222 | Wafer handling systems and methods | William T. Weaver, Robert Brent Vopat, Jason M. Schaller, Jacob Newman, Dinesh Kanawade +4 more | 2016-03-08 |
| 9240338 | Workpiece alignment device | Charles T. Carlson, William T. Weaver | 2016-01-19 |