| 9484183 |
Linkage conduit for vacuum chamber applications |
Eric D. Hermanson, Robert J. Mitchell, Steven M. Anella, Jeffrey Blahnik, Michael Paul Rohrer +1 more |
2016-11-01 |
| 9437392 |
High-throughput ion implanter |
Charles T. Carlson, Joseph C. Olson, James P. Buonodono, Paul Sullivan |
2016-09-06 |
| 9415508 |
Multi-link substrate scanning device |
Robert J. Mitchell |
2016-08-16 |
| 9378994 |
Multi-position batch load lock apparatus and systems and methods including same |
Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more |
2016-06-28 |
| 9287148 |
Dynamic heating method and system for wafer processing |
Morgan Evans, Kevin Anglin, D. Jeffrey Lischer, Jason M. Schaller, Robert Brent Vopat |
2016-03-15 |
| 9281222 |
Wafer handling systems and methods |
Malcolm N. Daniel, JR., Robert Brent Vopat, Jason M. Schaller, Jacob Newman, Dinesh Kanawade +4 more |
2016-03-08 |
| 9240338 |
Workpiece alignment device |
Malcolm N. Daniel, JR., Charles T. Carlson |
2016-01-19 |
