Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520312 | System and method for moving workpieces between multiple vacuum environments | — | 2016-12-13 |
| 9484183 | Linkage conduit for vacuum chamber applications | Eric D. Hermanson, Robert J. Mitchell, Steven M. Anella, Jeffrey Blahnik, William T. Weaver +1 more | 2016-11-01 |
| 9437392 | High-throughput ion implanter | William T. Weaver, Charles T. Carlson, Joseph C. Olson, Paul Sullivan | 2016-09-06 |
| 9337076 | Workpiece support structure with four degree of freedom air bearing for high vacuum systems | Michael Esposito | 2016-05-10 |
| 9287085 | Processing apparatus and method of treating a substrate | Ernest E. Allen, Jon Ballou, Kevin M. Daniels, Joseph P. Dzengeleski | 2016-03-15 |