Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9297063 | Plasma potential modulated ion implantation system | Svetlana B. Radovanov, Victor M. Benveniste, Bon-Woong Koo, Richard M. White | 2016-03-29 |
| 9287085 | Processing apparatus and method of treating a substrate | Ernest E. Allen, Jon Ballou, James P. Buonodono, Joseph P. Dzengeleski | 2016-03-15 |