Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9297063 | Plasma potential modulated ion implantation system | Svetlana B. Radovanov, Victor M. Benveniste, Bon-Woong Koo, Kevin M. Daniels | 2016-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9297063 | Plasma potential modulated ion implantation system | Svetlana B. Radovanov, Victor M. Benveniste, Bon-Woong Koo, Kevin M. Daniels | 2016-03-29 |