Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520259 | Ion beam uniformity control | Alexandre Likhanskii, Bon-Woong Koo | 2016-12-13 |
| 9514912 | Control of ion angular distribution of ion beams with hidden deflection electrode | Costel Biloiu, Peter F. Kurunczi, Tyler Rockwell, Christopher Campbell, Vikram Singh | 2016-12-06 |
| 9478399 | Multi-aperture extraction system for angled ion beam | Alexandre Likhanskii, William Davis Lee | 2016-10-25 |
| 9297063 | Plasma potential modulated ion implantation system | Victor M. Benveniste, Bon-Woong Koo, Richard M. White, Kevin M. Daniels | 2016-03-29 |
| 9288889 | Apparatus and techniques for energetic neutral beam processing | Bon-Woong Koo, Peter F. Kurunczi, Ludovic Godet | 2016-03-15 |
| 9230773 | Ion beam uniformity control | Alexandre Likhanskii, Bon-Woong Koo | 2016-01-05 |
| 9232628 | Method and system for plasma-assisted ion beam processing | Ludovic Godet, Bon-Woong Koo | 2016-01-05 |