Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514912 | Control of ion angular distribution of ion beams with hidden deflection electrode | Peter F. Kurunczi, Tyler Rockwell, Christopher Campbell, Vikram Singh, Svetlana B. Radovanov | 2016-12-06 |
| 9396902 | Gallium ION source and materials therefore | Craig R. Chaney, Neil J. Bassom, Benjamin Colombeau, Dennis Rodier | 2016-07-19 |
| 9299536 | Wide metal-free plasma flood gun | — | 2016-03-29 |
| 9293301 | In situ control of ion angular distribution in a processing apparatus | Nini Munoz, Ludovic Godet, Anthony Renau | 2016-03-22 |