Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524849 | Method of improving ion beam quality in an implant system | John W. Graff, John A. Frontiero, Nicholas PT Bateman, Timothy J. Miller, Vikram M. Bhosle | 2016-12-20 |
| 9520259 | Ion beam uniformity control | Alexandre Likhanskii, Svetlana B. Radovanov | 2016-12-13 |
| 9478679 | Dielectric coating of the edge of a solar cell | Nicholas P. T. Bateman, Vikram M. Bhosle | 2016-10-25 |
| 9441290 | System and method of improving implant quality in a plasma-based implant system | Min Sung JEON, Yong Tae Kim, Timothy J. Miller | 2016-09-13 |
| 9297063 | Plasma potential modulated ion implantation system | Svetlana B. Radovanov, Victor M. Benveniste, Richard M. White, Kevin M. Daniels | 2016-03-29 |
| 9288889 | Apparatus and techniques for energetic neutral beam processing | Svetlana B. Radovanov, Peter F. Kurunczi, Ludovic Godet | 2016-03-15 |
| 9230773 | Ion beam uniformity control | Alexandre Likhanskii, Svetlana B. Radovanov | 2016-01-05 |
| 9232628 | Method and system for plasma-assisted ion beam processing | Svetlana B. Radovanov, Ludovic Godet | 2016-01-05 |