Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524849 | Method of improving ion beam quality in an implant system | John W. Graff, Bon-Woong Koo, John A. Frontiero, Nicholas PT Bateman, Vikram M. Bhosle | 2016-12-20 |
| 9441290 | System and method of improving implant quality in a plasma-based implant system | Bon-Woong Koo, Min Sung JEON, Yong Tae Kim | 2016-09-13 |
| 9384937 | SiC coating in an ion implanter | Robert J. Mason, Shardul S. Patel, Robert H. Bettencourt | 2016-07-05 |