Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478399 | Multi-aperture extraction system for angled ion beam | Alexandre Likhanskii, Svetlana B. Radovanov | 2016-10-25 |
| 9435038 | Ion implant assisted metal etching | Thomas R. Omstead, Tristan Y. Ma | 2016-09-06 |
| 9287079 | Apparatus for dynamic temperature control of an ion source | Craig R. Chaney, Neil J. Bassom | 2016-03-15 |
| 9281165 | Bias electrodes for tandem accelerator | Shengwu Chang, Christopher Lupoli, Frank Sinclair, James Alan Pixley | 2016-03-08 |
| 9275820 | Gas coupled arc chamber cooling | Neil J. Bassom, Dennis Klesel | 2016-03-01 |
| 9236216 | In-vacuum high speed pre-chill and post-heat stations | William P. Reynolds, Stanley W. Stone | 2016-01-12 |