Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520290 | Ion implantation for improved etch performance | Maureen Petterson | 2016-12-13 |
| 9512517 | Multiple exposure treatment for processing a patterning feature | Maureen Petterson, John Hautala, Ludovic Godet | 2016-12-06 |
| 9460961 | Techniques and apparatus for anisotropic metal etching | Thomas R. Omstead, Ludovic Godet | 2016-10-04 |
| 9435038 | Ion implant assisted metal etching | Thomas R. Omstead, William Davis Lee | 2016-09-06 |
| 9396965 | Techniques and apparatus for anisotropic metal etching | Ludovic Godet, Thomas R. Omstead | 2016-07-19 |
| 9385219 | Method and apparatus for selective deposition | Ellie Yieh, Srinivas D. Nemani, Ludovic Godet, Yin Fan | 2016-07-05 |
| 9377692 | Electric/magnetic field guided acid diffusion | Peng Xie, Ludovic Godet, Joseph C. Olson, Christopher Dennis Bencher | 2016-06-28 |
| 9336998 | Apparatus and method for dynamic control of ion beam energy and angle | Ludovic Godet, Daniel Distaso, Nini Munoz, Yu-Kang Liu | 2016-05-10 |
| 9268228 | Techniques for patterning a substrate | Ludovic Godet | 2016-02-23 |