Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520290 | Ion implantation for improved etch performance | Tristan Y. Ma | 2016-12-13 |
| 9512517 | Multiple exposure treatment for processing a patterning feature | Tristan Y. Ma, John Hautala, Ludovic Godet | 2016-12-06 |