Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460961 | Techniques and apparatus for anisotropic metal etching | Tristan Y. Ma, Ludovic Godet | 2016-10-04 |
| 9453279 | Method for selectively depositing a layer on a three dimensional structure | Simon Ruffell, Anthony Renau | 2016-09-27 |
| 9435038 | Ion implant assisted metal etching | William Davis Lee, Tristan Y. Ma | 2016-09-06 |
| 9396965 | Techniques and apparatus for anisotropic metal etching | Tristan Y. Ma, Ludovic Godet | 2016-07-19 |
| 9343317 | Methods of forming silicon-containing dielectric materials and semiconductor device structures | Cole S. Franklin | 2016-05-17 |