Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478421 | Optically tuned hardmask for multi-patterning applications | Christopher Dennis Bencher, Daniel Lee Diehl, Huixiong Dai, Yong Cao, Tingjun Xu +1 more | 2016-10-25 |
| 9411237 | Resist hardening and development processes for semiconductor device manufacturing | Christopher Dennis Bencher, Huixiong Dai, Timothy Michaelson, Subhash Deshmukh | 2016-08-09 |
| 9377692 | Electric/magnetic field guided acid diffusion | Ludovic Godet, Tristan Y. Ma, Joseph C. Olson, Christopher Dennis Bencher | 2016-06-28 |
| 9366966 | Electric/magnetic field guided acid profile control in a photoresist layer | Ludovic Godet | 2016-06-14 |
| 9280070 | Field guided exposure and post-exposure bake process | Ludovic Godet | 2016-03-08 |
| 9256946 | Accuracy compensation method, system, and device | CHIH-KUANG CHANG, XIN-YUAN WU | 2016-02-09 |