Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478421 | Optically tuned hardmask for multi-patterning applications | Christopher Dennis Bencher, Huixiong Dai, Yong Cao, Tingjun Xu, Weimin Zeng +1 more | 2016-10-25 |
| 9478697 | Reusable substrate carrier | Sriskantharajah Thirunavukarasu, Mingwei Zhu, Karthik Elumalai, Thean Ming Tan, Yong Cao +1 more | 2016-10-25 |
| 9337051 | Method for critical dimension reduction using conformal carbon films | Bencherki Mebarki, Bok Hoen Kim, Deenesh Padhi, Li Yan Miao, Pramit Manna +4 more | 2016-05-10 |