Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502263 | UV assisted CVD AlN film for BEOL etch stop application | Alexandros T. Demos | 2016-11-22 |
| 9425078 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Jun Qian, Hu Kang, Adrien LaVoie +1 more | 2016-08-23 |
| 9337051 | Method for critical dimension reduction using conformal carbon films | Bencherki Mebarki, Bok Hoen Kim, Li Yan Miao, Pramit Manna, Christopher Dennis Bencher +4 more | 2016-05-10 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim +11 more | 2016-05-10 |