Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Mohamad A. Ayoub, Hyung Joon Kim, Karthik Janakiraman +11 more | 2016-05-10 |
| 9275838 | Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof | Neungho Shin, Yunsang Kim, Andrew D. Bailey, III | 2016-03-01 |