Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466469 | Remote plasma source for controlling plasma skew | Abdul Aziz Khaja, Ramesh Bokka, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez | 2016-10-11 |
| 9458537 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2016-10-04 |
| 9386680 | Detecting plasma arcs by monitoring RF reflected power in a plasma processing chamber | Jian J. Chen, Shilpa Sudhakaran | 2016-07-05 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Hyung Joon Kim, Karthik Janakiraman +11 more | 2016-05-10 |