Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506145 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Scott A. Hendrickson, Abhijit A. Kangude +6 more | 2016-11-29 |
| 9466469 | Remote plasma source for controlling plasma skew | Abdul Aziz Khaja, Mohamad A. Ayoub, Ramesh Bokka, Jay D. Pinson, II | 2016-10-11 |
| 9458537 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2016-10-04 |
| 9428424 | Critical chamber component surface improvement to reduce chamber particles | Ren-Guan Duan, Ramprakash Sankarakrishnan | 2016-08-30 |
| 9384950 | Chamber coatings | Ren-Guan Duan, Jianhua Zhou, Ningli Liu, Yihong Chen, Abhijit Basu Mallick +1 more | 2016-07-05 |
| 9364871 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Scott A. Hendrickson, Abhijit A. Kangude +6 more | 2016-06-14 |
| 9305749 | Methods of directing magnetic fields in a plasma source, and associated systems | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa | 2016-04-05 |