Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506145 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson, Abhijit A. Kangude +6 more | 2016-11-29 |
| 9508545 | Selectively lateral growth of silicon oxide thin film | Yihong Chen, Shaunak Mukherjee, Abhijit Basu Mallick | 2016-11-29 |
| 9478460 | Cobalt selectivity improvement in selective cobalt process sequence | Mei-Yee Shek, Weifeng YE, Li-Qun Xia, Kang Sub Yim | 2016-10-25 |
| 9364871 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson, Abhijit A. Kangude +6 more | 2016-06-14 |
| 9330231 | Method for determining a flow behavior of a medium | Goetz G. FELDMANN | 2016-05-03 |
| 9330900 | Layer-by-layer deposition of carbon-doped oxide films through cyclical silylation | — | 2016-05-03 |