Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478460 | Cobalt selectivity improvement in selective cobalt process sequence | Mei-Yee Shek, Weifeng YE, Kang Sub Yim, Kelvin Chan | 2016-10-25 |
| 9443716 | Precise critical dimension control using bilayer ALD | Kenji Takeshita, Nobuhiro Sakamoto, Yoshihiro Takenaga, Mandyam Sriram | 2016-09-13 |
| 9297073 | Accurate film thickness control in gap-fill technology | Ning Li, Wenbo Yan, Victor Nguyen, Cong Trinh, Mihaela Balseanu | 2016-03-29 |