Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443716 | Precise critical dimension control using bilayer ALD | Kenji Takeshita, Nobuhiro Sakamoto, Yoshihiro Takenaga, Li-Qun Xia | 2016-09-13 |
| 9230800 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh +9 more | 2016-01-05 |