Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443716 | Precise critical dimension control using bilayer ALD | Kenji Takeshita, Yoshihiro Takenaga, Li-Qun Xia, Mandyam Sriram | 2016-09-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443716 | Precise critical dimension control using bilayer ALD | Kenji Takeshita, Yoshihiro Takenaga, Li-Qun Xia, Mandyam Sriram | 2016-09-13 |