Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478408 | Systems and methods for removing particles from a substrate processing chamber using RF plasma cycling and purging | Adrien LaVoie | 2016-10-25 |
| 9425078 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Jun Qian, Adrien LaVoie, Deenesh Padhi +1 more | 2016-08-23 |
| 9355839 | Sub-saturated atomic layer deposition and conformal film deposition | Shankar Swaminathan, Adrien LaVoie | 2016-05-31 |
| 9287113 | Methods for depositing films on sensitive substrates | Shankar Swaminathan, Adrien LaVoie, Jon Henri | 2016-03-15 |
| 9257274 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Shankar Swaminathan, Jun Qian, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2016-02-09 |
| 9230800 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Ramesh Chandrasekharan, Tom Dorsh, Dennis M. Hausmann +9 more | 2016-01-05 |