Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524923 | Semiconductor structure and method for manufacturing the same | Xiao Han, Ju Zhang | 2016-12-20 |
| 9425078 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Hu Kang, Adrien LaVoie, Deenesh Padhi +1 more | 2016-08-23 |
| 9372116 | Automatic initiation of reference spectra library generation for optical monitoring | Jeffrey Drue David | 2016-06-21 |
| 9362186 | Polishing with eddy current feed meaurement prior to deposition of conductive layer | Tomohiko Kitajima, Jeffrey Drue David, Taketo Sekine, Garlen C. Leung, Sidney P. Huey | 2016-06-07 |
| 9289875 | Feed forward and feed-back techniques for in-situ process control | Jeffrey Drue David, Harry Q. Lee | 2016-03-22 |
| 9257274 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2016-02-09 |
| 9242337 | Dynamic residue clearing control with in-situ profile control (ISPC) | Sivakumar Dhandapani, Benjamin Cherian, Thomas H. Osterheld, Charles C. Garretson | 2016-01-26 |