Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490186 | Limiting adjustment of polishing rates during substrate polishing | Dominic J. Benvegnu, Benjamin Cherian, Sivakumar Dhandapani | 2016-11-08 |
| 9482610 | Techniques for matching spectra | Kiran Shrestha, Boguslaw A. Swedek, Jeffrey Drue David | 2016-11-01 |
| 9375824 | Adjustment of polishing rates during substrate polishing with predictive filters | Dominic J. Benvegnu, Benjamin Cherian, Sivakumar Dhandapani | 2016-06-28 |
| 9346146 | Adjusting polishing rates by using spectrographic monitoring of a substrate during processing | Jeffrey Drue David, Dominic J. Benvegnu, Boguslaw A. Swedek | 2016-05-24 |
| 9296084 | Polishing control using weighting with default sequence | Jimin Zhang, Zhihong Wang, Wen-Chiang Tu | 2016-03-29 |
| 9289875 | Feed forward and feed-back techniques for in-situ process control | Jeffrey Drue David, Jun Qian | 2016-03-22 |
| 9283653 | Dynamically tracking spectrum features for endpoint detection | Jeffrey Drue David | 2016-03-15 |
| 9248544 | Endpoint detection during polishing using integrated differential intensity | Jimin Zhang, Zhihong Wang, Wen-Chiang Tu | 2016-02-02 |
| 9227293 | Multi-platen multi-head polishing architecture | Jeffrey Drue David, Boguslaw A. Swedek, Doyle E. Bennett, Thomas H. Osterheld, Benjamin Cherian +3 more | 2016-01-05 |