Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520266 | Pattern critical dimension measurement equipment and method for measuring pattern critical dimension | Kaori Shirahata, Yasunari Sohda, Makoto Sakakibara, Daisuke Bizen, Hideyuki Kazumi | 2016-12-13 |
| 9478392 | Charged particle beam apparatus and image generation method | Kazuki Ikeda, Wen Li, Ryo Kadoi, Hisaaki Kanai, Hiroyuki Takahashi +1 more | 2016-10-25 |
| 9443695 | Charged-particle beam device | Takeyoshi Ohashi, Yasunari Sohda, Noritsugu Takahashi, Osamu Komuro | 2016-09-13 |
| 9368319 | Method for removing foreign substances in charged particle beam device, and charged particle beam device | Kazuma Tanii, Yuji Kasai, Masakazu Takahashi | 2016-06-14 |
| 9368324 | Measurement and inspection device | Wen Li, Hiroyuki Takahashi, Makoto Suzuki | 2016-06-14 |
| 9343878 | Manufacturing method of main metal fitting for spark plug and manufacturing method of spark plug | Koji Kamikawa | 2016-05-17 |
| 9336984 | Charged particle beam device and measuring method using the same | Daisuke Bizen, Hideyuki Kazumi | 2016-05-10 |
| 9312091 | Charged particle beam apparatus | Yasunari Sohda, Tasuku Yano, Muneyuki Fukuda, Noritsugu Takahashi, Hiroyuki Ito | 2016-04-12 |
| 9236220 | Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope | Natsuki Tsuno, Hideyuki Kazumi, Takafumi Miwa, Yoshinobu Kimura | 2016-01-12 |