Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520266 | Pattern critical dimension measurement equipment and method for measuring pattern critical dimension | Yasunari Sohda, Makoto Sakakibara, Daisuke Bizen, Hajime Kawano, Hideyuki Kazumi | 2016-12-13 |