Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9521372 | Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded | Yoshinori Momonoi, Koichi Hamada, Yuji Takagi, Michio Hatano | 2016-12-13 |
| 9520266 | Pattern critical dimension measurement equipment and method for measuring pattern critical dimension | Kaori Shirahata, Yasunari Sohda, Makoto Sakakibara, Daisuke Bizen, Hajime Kawano | 2016-12-13 |
| 9502212 | Charged particle beam apparatus | Yuzuru Mizuhara, Miki Isawa, Minoru Yamazaki, Hitoshi Tamura | 2016-11-22 |
| 9484181 | Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus | Hideto Dohi, Akira Ikegami | 2016-11-01 |
| 9472376 | Scanning electron microscope | Toshiyuki Yokosuka, Chahn Lee, Hiroshi Makino, Yuzuru Mizuhara, Miki Isawa +2 more | 2016-10-18 |
| 9336984 | Charged particle beam device and measuring method using the same | Daisuke Bizen, Hajime Kawano | 2016-05-10 |
| 9236220 | Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope | Natsuki Tsuno, Takafumi Miwa, Yoshinobu Kimura, Hajime Kawano | 2016-01-12 |