Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520266 | Pattern critical dimension measurement equipment and method for measuring pattern critical dimension | Kaori Shirahata, Yasunari Sohda, Daisuke Bizen, Hajime Kawano, Hideyuki Kazumi | 2016-12-13 |
| 9287082 | Charged particle beam apparatus | Kenichi Morita, Sayaka Tanimoto, Muneyuki Fukuda, Naomasa Suzuki, Kenji Obara | 2016-03-15 |