Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520266 | Pattern critical dimension measurement equipment and method for measuring pattern critical dimension | Kaori Shirahata, Makoto Sakakibara, Daisuke Bizen, Hajime Kawano, Hideyuki Kazumi | 2016-12-13 |
| 9443695 | Charged-particle beam device | Takeyoshi Ohashi, Noritsugu Takahashi, Hajime Kawano, Osamu Komuro | 2016-09-13 |
| 9312091 | Charged particle beam apparatus | Tasuku Yano, Muneyuki Fukuda, Noritsugu Takahashi, Hajime Kawano, Hiroyuki Ito | 2016-04-12 |
| 9261360 | Charged particle beam microscope | Nobuhiro Okai, Junichi Tanaka | 2016-02-16 |
| 9230775 | Charged particle instrument | Takeyoshi Ohashi, Makoto Ezumi, Muneyuki Fukuda, Noritsugu Takahashi | 2016-01-05 |