Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384940 | Charged particle beam apparatus | Muneyuki Fukuda, Akira Ikegami, Hideto Dohi, Momoyo Enyama, Tomoyasu Shojo | 2016-07-05 |
| 9324540 | Charged particle beam device | Ichiro Tachibana | 2016-04-26 |
| 9312099 | Charged particle beam device and method for analyzing defect therein | Kenji Obara, Satoshi Umehara | 2016-04-12 |
| 9287082 | Charged particle beam apparatus | Kenichi Morita, Sayaka Tanimoto, Makoto Sakakibara, Muneyuki Fukuda, Kenji Obara | 2016-03-15 |
| 9287084 | Aberration corrector and charged particle beam apparatus using the same | Zhaohui Cheng, Hideo Kashima, Hiroaki Baba, Takeyoshi Ohashi, Tomonori Nakano +1 more | 2016-03-15 |