Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9368319 | Method for removing foreign substances in charged particle beam device, and charged particle beam device | Yuji Kasai, Masakazu Takahashi, Hajime Kawano | 2016-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9368319 | Method for removing foreign substances in charged particle beam device, and charged particle beam device | Yuji Kasai, Masakazu Takahashi, Hajime Kawano | 2016-06-14 |