Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9490186 | Limiting adjustment of polishing rates during substrate polishing | Dominic J. Benvegnu, Sivakumar Dhandapani, Harry Q. Lee | 2016-11-08 | $17,585,000 |
| 9375824 | Adjustment of polishing rates during substrate polishing with predictive filters | Dominic J. Benvegnu, Sivakumar Dhandapani, Harry Q. Lee | 2016-06-28 | $9,817,000 |
| 9242337 | Dynamic residue clearing control with in-situ profile control (ISPC) | Jun Qian, Sivakumar Dhandapani, Thomas H. Osterheld, Charles C. Garretson | 2016-01-26 | $7,094,000 |
| 9227293 | Multi-platen multi-head polishing architecture | Jeffrey Drue David, Boguslaw A. Swedek, Doyle E. Bennett, Thomas H. Osterheld, Dominic J. Benvegnu +3 more | 2016-01-05 | $12,358,000 |