Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9242337 | Dynamic residue clearing control with in-situ profile control (ISPC) | Jun Qian, Sivakumar Dhandapani, Benjamin Cherian, Charles C. Garretson | 2016-01-26 |
| 9227293 | Multi-platen multi-head polishing architecture | Jeffrey Drue David, Boguslaw A. Swedek, Doyle E. Bennett, Benjamin Cherian, Dominic J. Benvegnu +3 more | 2016-01-05 |