| 9482610 |
Techniques for matching spectra |
Kiran Shrestha, Boguslaw A. Swedek, Harry Q. Lee |
2016-11-01 |
| 9372116 |
Automatic initiation of reference spectra library generation for optical monitoring |
Jun Qian |
2016-06-21 |
| 9362186 |
Polishing with eddy current feed meaurement prior to deposition of conductive layer |
Tomohiko Kitajima, Jun Qian, Taketo Sekine, Garlen C. Leung, Sidney P. Huey |
2016-06-07 |
| 9352440 |
Serial feature tracking for endpoint detection |
— |
2016-05-31 |
| 9346146 |
Adjusting polishing rates by using spectrographic monitoring of a substrate during processing |
Dominic J. Benvegnu, Harry Q. Lee, Boguslaw A. Swedek |
2016-05-24 |
| 9289875 |
Feed forward and feed-back techniques for in-situ process control |
Jun Qian, Harry Q. Lee |
2016-03-22 |
| 9283653 |
Dynamically tracking spectrum features for endpoint detection |
Harry Q. Lee |
2016-03-15 |
| 9233450 |
Optical detection of metal layer clearance |
Dominic J. Benvegnu |
2016-01-12 |
| 9227293 |
Multi-platen multi-head polishing architecture |
Boguslaw A. Swedek, Doyle E. Bennett, Thomas H. Osterheld, Benjamin Cherian, Dominic J. Benvegnu +3 more |
2016-01-05 |
