Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496190 | Feedback of layer thickness timing and clearance timing for polishing control | Kun Xu, Feng Q. Liu, Dominic J. Benvegnu, Yuchun Wang, Wen-Chiang Tu +1 more | 2016-11-15 |
| 9482610 | Techniques for matching spectra | Kiran Shrestha, Jeffrey Drue David, Harry Q. Lee | 2016-11-01 |
| 9472475 | Feedback control using detection of clearance and adjustment for uniform topography | Kun Xu, Ingemar Carlsson, Tzu-Yu Liu, Shih-Haur Shen, Wen-Chiang Tu +1 more | 2016-10-18 |
| 9346146 | Adjusting polishing rates by using spectrographic monitoring of a substrate during processing | Jeffrey Drue David, Dominic J. Benvegnu, Harry Q. Lee | 2016-05-24 |
| 9333621 | Polishing pad for endpoint detection and related methods | Manoocher Birang | 2016-05-10 |
| 9281253 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2016-03-08 |
| 9275917 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2016-03-01 |
| 9227293 | Multi-platen multi-head polishing architecture | Jeffrey Drue David, Doyle E. Bennett, Thomas H. Osterheld, Benjamin Cherian, Dominic J. Benvegnu +3 more | 2016-01-05 |