Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496190 | Feedback of layer thickness timing and clearance timing for polishing control | Kun Xu, Dominic J. Benvegnu, Boguslaw A. Swedek, Yuchun Wang, Wen-Chiang Tu +1 more | 2016-11-15 |
| 9460959 | Methods for pre-cleaning conductive interconnect structures | Xiangjin Xie, Daping Yao, Alexander Jansen, Joung Joo Lee, Adolph Miller Allen +2 more | 2016-10-04 |