Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496190 | Feedback of layer thickness timing and clearance timing for polishing control | Feng Q. Liu, Dominic J. Benvegnu, Boguslaw A. Swedek, Yuchun Wang, Wen-Chiang Tu +1 more | 2016-11-15 |
| 9472475 | Feedback control using detection of clearance and adjustment for uniform topography | Ingemar Carlsson, Tzu-Yu Liu, Shih-Haur Shen, Boguslaw A. Swedek, Wen-Chiang Tu +1 more | 2016-10-18 |
| 9330054 | System and method for assigning a message | Tommi Jokinen, David B. Kramer | 2016-05-03 |
| 9281253 | Determination of gain for eddy current sensor | Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2016-03-08 |
| 9275917 | Determination of gain for eddy current sensor | Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2016-03-01 |