Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506145 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more | 2016-11-29 |
| 9478437 | Methods for repairing low-k dielectrics using carbon plasma immersion | Peter I. Porshnev | 2016-10-25 |
| 9460959 | Methods for pre-cleaning conductive interconnect structures | Xiangjin Xie, Feng Q. Liu, Alexander Jansen, Joung Joo Lee, Adolph Miller Allen +2 more | 2016-10-04 |
| 9364871 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more | 2016-06-14 |