Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506145 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson, Abhijit A. Kangude +6 more | 2016-11-29 |
| 9502263 | UV assisted CVD AlN film for BEOL etch stop application | Deenesh Padhi | 2016-11-22 |
| 9391024 | Multi-layer dielectric stack for plasma damage protection | Bo Xie, Kang Sub Yim, Cheng Pan, Sure Ngo, Taewan Kim | 2016-07-12 |
| 9364871 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson, Abhijit A. Kangude +6 more | 2016-06-14 |
| 9324571 | Post treatment for dielectric constant reduction with pore generation on low K dielectric films | Kang Sub Yim, Pendar Ardalan, Sure Ngo | 2016-04-26 |
| 9312167 | Air-gap structure formation with ultra low-k dielectric layer on PECVD low-k chamber | Taewan Kim, Kang Sub Yim | 2016-04-12 |