Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478460 | Cobalt selectivity improvement in selective cobalt process sequence | Mei-Yee Shek, Weifeng YE, Li-Qun Xia, Kelvin Chan | 2016-10-25 |
| 9391024 | Multi-layer dielectric stack for plasma damage protection | Bo Xie, Cheng Pan, Sure Ngo, Taewan Kim, Alexandros T. Demos | 2016-07-12 |
| 9324571 | Post treatment for dielectric constant reduction with pore generation on low K dielectric films | Pendar Ardalan, Sure Ngo, Alexandros T. Demos | 2016-04-26 |
| 9312167 | Air-gap structure formation with ultra low-k dielectric layer on PECVD low-k chamber | Taewan Kim, Alexandros T. Demos | 2016-04-12 |