Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9242337 | Dynamic residue clearing control with in-situ profile control (ISPC) | Jun Qian, Sivakumar Dhandapani, Benjamin Cherian, Thomas H. Osterheld | 2016-01-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9242337 | Dynamic residue clearing control with in-situ profile control (ISPC) | Jun Qian, Sivakumar Dhandapani, Benjamin Cherian, Thomas H. Osterheld | 2016-01-26 |